Macromodel-based simulation and measurement of the dynamic pull-in of viscously damped RF-MEMS switches
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چکیده
منابع مشابه
Electromechanical Modeling and Simulation of RF MEMS Switches
The design of RF MEMS switches involves several disciplines: mechanics, materials science and electrical engineering. While significant progress has been made in the RF design of the switches, mechanical and material studies are required for mass commercialization of reliable devices. Senturia and co-workers at MIT have presented a closed form solution to describe the electromechanical behavior...
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An overview of the MEMS technology development and applications is given in this paper. A special attention is paid to the RF MEMS switches. Both series and shunt MEMS switches have been considered. It is also presented a technique for modeling and design of inductively-tuned MEMS shunt switch. Some very important issues for the device maturity e.g. reliability and packaging have been addressed.
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15 صفحه اولDynamic Simulation and Design of Rf-mems Switches Made of Steel
ii Acknowledgements Many people deserve my heartfelt thanks for their help during my graduate work. First and foremost, I would like to thank my advisor, Prof. G. K. Anathasuresh, for his enduring support and encouragement. I have appreciated his ability to guide me toward appropriate solutions to the problems I have had to face. I also would like to thank him for letting me use his codes for s...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2010
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2010.09.052